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Fabrication
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Electron beam lithography
Photolithography
Thermal evaporation
E-beam evaporation
Sputtering
Plasma-enhanced chemical-vapor deposition (PECVD)
Reactive-ion etching (RIE)
Wet etching
Characterization
 
Scaning electron microscopy
Optical microscopy
Ellipsometry
Fourier transform infrared spectroscopy (FTIR)
UV-Vis spectrometery
Electrical characterization

We turn your design into a prototype through our access to multiple fabrication and characterization tools

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